Ceramics of Ca0.95M0.05(Ti0.95Li0.05)O2.85F0.15(M = Ca, Sr, Pb) are prepared from mixtures of CaTiO3, MF2and LiF powders by sintering at 950_C for 4 hours in free-air. The samples areinvestigated by X-ray diffraction, scanning electron microscopy, differentialscanning calorimetry and dielectric measurements. The phase transitions of pureCaTiO3 are strongly influenced by the incorporation of the fluoridemixture MF2 + LiF into the host lattice whereas the orthorhombicsymmetry at room temperature is not at all affected by the chemicalsubstitutions Ca-M, Ti-Li and O-F. The dielectric permittivity e'r and lossestand are slightly dependent of temperature between 20_C and 200_C. At roomtemperature, e'r is stable over a large frequency range with tand < 1%. TheCa0.95M0.05(Ti0.95Li0.05)O2.85F0.15(M = Ca, Sr, Pb) oxyfluorides are promising materials to manufacture resonators.